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利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计 Research Article

李晨1,2,贾蔓谷1,洪应平2,薛亚楠2,熊继军2

《信息与电子工程前沿（英文）》 2022年第23卷第5期页码 801-809 doi: 10.1631/FITEE.2100236

摘要：该加速度计由柔性聚酰亚胺（PI）衬底和平面螺旋电感（厚度为300 nm）组成，采用微机电系统（MEMS）技术，可任意弯曲或折叠，可牢固地粘附在具有弯曲结构的物体表面。

关键词：弯曲结构表面；柔性加速度计；微机电系统（MEMS）技术；无线非接触式测量

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

《机械工程前沿（英文）》 2013年第8卷第2期页码 146-149 doi: 10.1007/s11465-013-0260-z

摘要：

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

关键词： Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency error sensitivity

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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

《机械工程前沿（英文）》 2023年第18卷第2期 doi: 10.1007/s11465-023-0747-1

摘要： Capacitive sensors are efficient tools for biophysical force measurement, which is essential for the exploration of cellular behavior. However, attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive sensors. In this work, a bionic swallow structure design norm was developed for mechanical decoupling, and the influences of structural parameters on mechanical behavior were fully analyzed and optimized. A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic interferences. Electrostatic instability was evaluated, and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and application-specific integrated circuit readouts. An electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm, and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor, which can be easily compensated in readouts. The proposed sensor also exhibited high resistance against electrostatic rotation, and the resulting measurement error dropped below 0.751%. The rotation interferences were less than 0.330 nm and (1.829 × 10⁻⁷)°, which were 35 times smaller than those of the traditional differential one. Based on the proposed bionic decoupling method, the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/µm for gap-variant and area-variant devices, respectively, which were the highest among the current devices. High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices, respectively, indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.

关键词： micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical decoupling biomedical force measurement

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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

《机械工程前沿（英文）》 2008年第3卷第1期页码 37-43 doi: 10.1007/s11465-008-0001-x

摘要： A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical systems (MEMS) technology. Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volume and high precision, which are laid out and analyzed later. Meantime, through the analysis of the sample cell’s optical characteristics that have some impacts on the linearity of the spectrophotometer, a relationship equation, which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency, is put forward. When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference of the refractive index of the references does not influence the correlation coefficient and the slope of the absorbency-concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer is worked out, its correlation coefficient > 0.999, and its refractive index resolving power is better than 0.01.

关键词： mini-spectrophotometer referenced micro-silicon-fixer electro-mechanical correlation coefficient

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Special issue: Micro-electromechanical systems (MEMS)

Zhuangde JIANG

《机械工程前沿（英文）》 2017年第12卷第4期页码 457-458 doi: 10.1007/s11465-017-0492-4

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影响微电子机械系统成品率和可靠性和粘合力和磨擦力

王渭源

《中国工程科学》 2000年第2卷第3期页码 36-41

摘要：

文章评述了影响微电子机械系统（MEMS)成品率和可靠性的粘合力和摩擦力问题。解决粘合的最好办法是：在MEMS微结构的表面涂以抗粘合薄膜，将成品器件在干燥气氛下封装。介绍了抗粘合薄膜的制备工艺和目前存在的问题。相比之下，具有高速运动的MEMS,其摩擦力问题更为复杂。寻找既抗粘合、又耐磨的薄膜，是解决高速运动MEMS可靠性和寿命的一个关键。

关键词：微电子机械系统粘合力摩擦力抗粘合薄膜耐磨损薄膜

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用于微电子机械系统封装的体硅键合技术和薄膜密封技术

王渭源,王跃林

《中国工程科学》 2002年第4卷第6期页码 56-62

摘要：

对静电键合、体硅直接键合和界面层辅助键合等三种体硅键合技术，整片操作、局部操作和选择保护等三种密封技术，以及这些技术用于微电子机械系统的密封作了评述，强调在器件研究开始时应考虑封装问题，具体技术则应在保证器件功能和尽量减少芯片复杂性两者之间权衡决定。

关键词：体硅键合技术薄膜密封技术微电子机械系统封装技术

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Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

《能源前沿（英文）》 2009年第3卷第4期页码 381-388 doi: 10.1007/s11708-009-0057-2

摘要： The effect of Joule heating on the steady state electro-osmotic flow in a closed-end micro-channel is studied through numerical simulation with the finite volume method. The velocity field and the temperature field are described by a rigorous mathematical model. Thermophysical properties including viscosity and thermal conductivity are considered to be temperature-dependent. The simulations show that the presence of Joule heating causes an increase in temperature and a decrease in viscosity in the whole micro-channel, which, thereafter, induce a large velocity near the wall and an increase in fluid velocity at the central region in order to maintain a zero flow rate at the cross section of the micro-channel. The effect of Joule heating on the induced pressure gradient is also studied, which is very important for the application of the closed-end micro-channel as a micro-actuator. The results reveal that the induced pressure gradient, taking into consideration Joule heating, is significantly smaller than that without considering Joule heating when the wall temperature of the micro-channel is constant. The induced pressure gradient difference between considering Joule heating and without considering Joule heating is small under the convective boundary condition.

关键词： closed-end micro-channel electrical double layer electro-osmotic flow induced pressure gradient Joule heating

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Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

《工程管理前沿（英文）》 2016年第3卷第2期页码 115-122 doi: 10.15302/J-FEM-2016019

摘要： The uncertainties of remanufactured products in multi-life cycle service, such as injury and restoration process route, are comprehensively analyzed in the present study from perspectives of cost and the environment. Based on life cycle assessment method and the life cycle cost analysis, the optimal timing model of active remanufacturing for electro-mechanical products is established considering these uncertainties. In addition, regarding the active remanufacturing as its guidance, this study explores the economic efficiency and corresponding operation mode of electro-mechanical products when recycling in the optimal timing. To validate the optimal timing model for electro-mechanical products active remanufacturing, a specific type of product is taken as a case study with mathematical statistics method and Monte Carlo simulation.

关键词： electro-mechanical products active remanufacturing optimal timing reverse logistics recycling mode

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Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

《机械工程前沿（英文）》 2017年第12卷第1期页码 18-32 doi: 10.1007/s11465-017-0410-9

摘要：

Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

关键词： micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB)

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Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate

《结构与土木工程前沿（英文）》 2021年第15卷第4期页码 1047-1057 doi: 10.1007/s11709-021-0755-3

摘要： Magnesium phosphate cement (MPC) received increased attention in recent years, but MPC-based concrete is rarely reported. The micro-steel fibers (MSF) were added to MPC-based concrete to enhance its ductility due to the high brittleness in tensile and flexural strength properties of MPC. This paper investigates the effect of MSF volume fraction on the mechanical properties of a new pattern of MPC-based concrete. The temperature development curve, fluidity, cubic compressive strength, modulus of elastic, axial compressive strength, and four-point flexural strength were experimentally studied with 192 specimens, and a scanning electron microscopy (SEM) test was carried out after the specimens were failed. Based on the test results, the correlations between the cubic compressive strength and curing age, the axial and cubic compressive strength of MPC-based concrete were proposed. The results showed that with the increase of MSF volume fraction, the fluidity of fresh MPC-based concrete decreased gradually. MSF had no apparent influence on the compressive strength, while it enhanced the four-point flexural strength of MPC-based concrete. The four-point flexural strength of specimens with MSF volume fraction from 0.25% to 0.75% were 12.3%, 21.1%, 24.6% higher than that of the specimens without MSF, respectively.

关键词： magnesium phosphate cement-based concrete micro-steel fibers four-point flexural strength compressive strength

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Performance analysis of cogeneration systems based on micro gas turbine (MGT), organic Rankine cycle

Zemin BO, Kai ZHANG, Peijie SUN, Xiaojing LV, Yiwu WENG

《能源前沿（英文）》 2019年第13卷第1期页码 54-63 doi: 10.1007/s11708-018-0606-7

摘要： In this paper, the operation performance of three novel kinds of cogeneration systems under design and off-design condition was investigated. The systems are MGT (micro gas turbine) + ORC (organic Rankine cycle) for electricity demand, MGT+ ERC (ejector refrigeration cycle) for electricity and cooling demand, and MGT+ ORC+ ERC for electricity and cooling demand. The effect of 5 different working fluids on cogeneration systems was studied. The results show that under the design condition, when using R600 in the bottoming cycle, the MGT+ ORC system has the lowest total output of 117.1 kW with a thermal efficiency of 0.334, and the MGT+ ERC system has the largest total output of 142.6 kW with a thermal efficiency of 0.408. For the MGT+ ORC+ ERC system, the total output is between the other two systems, which is 129.3 kW with a thermal efficiency of 0.370. For the effect of different working fluids, R123 is the most suitable working fluid for MGT+ ORC with the maximum electricity output power and R600 is the most suitable working fluid for MGT+ ERC with the maximum cooling capacity, while both R600 and R123 can make MGT+ ORC+ ERC achieve a good comprehensive performance of refrigeration and electricity. The thermal efficiency of three cogeneration systems can be effectively improved under off-design condition because the bottoming cycle can compensate for the power decrease of MGT. The results obtained in this paper can provide a reference for the design and operation of the cogeneration system for distributed energy systems (DES).

关键词： cogeneration system different working fluids micro gas turbine (MGT) organic Rankine cycle (ORC) ejector refrigeration cycle (ERC)

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Additive direct-write microfabrication for MEMS: A review

Kwok Siong TEH

《机械工程前沿（英文）》 2017年第12卷第4期页码 490-509 doi: 10.1007/s11465-017-0484-4

摘要：

Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from computer-generated solid models without elaborate intermediate fabrication steps. At the macroscale, direct-write techniques such as stereolithography, selective laser sintering, fused deposition modeling ink-jet printing, and laminated object manufacturing have significantly reduced concept-to-product lead time, enabled complex geometries, and importantly, has led to the renaissance in fabrication known as the . The technological premises of all direct-write additive manufacturing are identical—converting computer generated three-dimensional models into layers of two-dimensional planes or slices, which are then reconstructed sequentially into three-dimensional solid objects in a layer-by-layer format. The key differences between the various additive manufacturing techniques are the means of creating the finished layers and the ancillary processes that accompany them. While still at its infancy, direct-write additive manufacturing techniques at the microscale have the potential to significantly lower the barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMS parts that have larger dimensions, high aspect ratios, and complex shapes. In recent years, significant advancements in materials chemistry, laser technology, heat and fluid modeling, and control systems have enabled additive manufacturing to achieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMS fabrication. Compared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, direct-write additive manufacturing techniques allow for rapid design-to-prototype realization by limiting or circumventing the need for cleanrooms, photolithography and extensive training. With current direct-write additive manufacturing technologies, it is possible to fabricate unsophisticated micrometer scale structures at adequate resolutions and precisions using materials that range from polymers, metals, ceramics, to composites. In both academia and industry, direct-write additive manufacturing offers extraordinary promises to revolutionize research and development in microfabrication and MEMS technologies. Importantly, direct-write additive manufacturing could appreciably augment current MEMS fabrication technologies, enable faster design-to-product cycle, empower new paradigms in MEMS designs, and critically, encourage wider participation in MEMS research at institutions or for individuals with limited or no access to cleanroom facilities. This article aims to provide a limited review of the current landscape of direct-write additive manufacturing techniques that are potentially applicable for MEMS microfabrication.

关键词： direct-write additive manufacturing microfabrication MEMS

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Effect of land-use management systems on coupled physical and mechanical, chemical and biological soil

Rainer HORN, Winfried E. H. BLUM

《农业科学与工程前沿（英文）》 2020年第7卷第3期页码 243-245 doi: 10.15302/J-FASE-2020334

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Analysis of suitable geometrical parameters for designing a tendon-driven under-actuated mechanical finger

Francesco PENTA,Cesare ROSSI,Sergio SAVINO

《机械工程前沿（英文）》 2016年第11卷第2期页码 184-194 doi: 10.1007/s11465-016-0385-y

摘要：

This study aims to optimize the geometrical parameters of an under-actuated mechanical finger by conducting a theoretical analysis of these parameters. The finger is actuated by a flexion tendon and an extension tendon. The considered parameters are the tendon guide positions with respect to the hinges. By applying such an optimization, the correct kinematical and dynamical behavior of the closing cycle of the finger can be obtained. The results of this study are useful for avoiding the snap-through and the single joint hyperflexion, which are the two breakdowns most frequently observed during experimentation on prototypes. Diagrams are established to identify the optimum values for the tendon guides position of a finger with specified dimensions. The findings of this study can serve as guide for future finger design.

关键词： tendon-driven fingers mechanical finger design under-actuated mechanical systems